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Structure of AlN films deposited by magnetron sputtering method

K. Nowakowska-Langier

K. Nowakowska-Langier

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Nowakowska-Langier, K.
, 
R. Chodun

R. Chodun

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Chodun, R.
, 
K. Zdunek

K. Zdunek

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Zdunek, K.
, 
R. Minikayev

R. Minikayev

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Minikayev, R.
 and 
R. Nietubyc

R. Nietubyc

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Nietubyc, R.
  
Aug 30, 2016
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Published Online: Aug 30, 2016
Page range: 639 - 643
Received: Jan 15, 2015
Accepted: Apr 25, 2015
DOI: https://doi.org/10.1515/msp-2015-0073
Keywords
© 2016
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 3.0 License.
Nowakowska-Langier, K.
Chodun, R.
Zdunek, K.
Minikayev, R.
Nietubyc, R.
Language:
English
Publication timeframe:
4 times per year
Journal Subjects:
Materials Sciences, Materials Sciences, other, Nanomaterials, Functional and Smart Materials, Materials Characterization and Properties
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