Skip to content
Publish & Distribute
Publishing Solutions
Distribution Solutions
Library Services
Subjects
Architecture and Design
Arts
Business and Economics
Chemistry
Classical and Ancient Near Eastern Studies
Computer Sciences
Cultural Studies
Engineering
General Interest
Geosciences
History
Industrial Chemistry
Jewish Studies
Law
Library and Information Science, Book Studies
Life Sciences
Linguistics and Semiotics
Literary Studies
Materials Sciences
Mathematics
Medicine
Music
Pharmacy
Philosophy
Physics
Social Sciences
Sports and Recreation
Theology and Religion
Publications
Journals
Books
Proceedings
Publishers
Journal Matcher
Blog
Contact
Search
English
English
Deutsch
Polski
Español
Français
Italiano
Cart
Home
Journals
Materials Science-Poland
Volume 33 (2015): Issue 3 (September 2015)
Open Access
Structure of AlN films deposited by magnetron sputtering method
K. Nowakowska-Langier
K. Nowakowska-Langier
Search for this author on
Sciendo
|
Google Scholar
Nowakowska-Langier, K.
,
R. Chodun
R. Chodun
Search for this author on
Sciendo
|
Google Scholar
Chodun, R.
,
K. Zdunek
K. Zdunek
Search for this author on
Sciendo
|
Google Scholar
Zdunek, K.
,
R. Minikayev
R. Minikayev
Search for this author on
Sciendo
|
Google Scholar
Minikayev, R.
and
R. Nietubyc
R. Nietubyc
Search for this author on
Sciendo
|
Google Scholar
Nietubyc, R.
Aug 30, 2016
Materials Science-Poland
Volume 33 (2015): Issue 3 (September 2015)
About this article
Previous Article
Next Article
Abstract
References
Authors
Articles in this Issue
Preview
PDF
Cite
Share
Download Cover
Published Online:
Aug 30, 2016
Page range:
639 - 643
Received:
Jan 15, 2015
Accepted:
Apr 25, 2015
DOI:
https://doi.org/10.1515/msp-2015-0073
Keywords
AlN films
,
magnetron sputtering method
,
crystalline structure
© 2016
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 3.0 License.
