Controlled fluoridation of amorphous carbon films deposited at reactive plasma conditions

Publicado en línea: 30 ago 2016

Páginas: 606 - 611

Recibido: 13 ene 2014

Aceptado: 31 may 2015

DOI: https://doi.org/10.1515/msp-2015-0088

Palabras clave

carbon deposition, reactive plasma, fluoridation

© 2016

This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 3.0 License.