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Materials Science-Poland
AHEAD OF PRINT
Open Access
Stereometric analysis of Ta
2
O
5
thin films
Dinara Sobola
Dinara Sobola
Brno University of Technology, Faculty of Electrical Engineering and Communication, Physics Department
Brno,
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Sobola, Dinara
,
Pavel Kaspar
Pavel Kaspar
Brno University of Technology, Faculty of Electrical Engineering and Communication, Physics Department
Brno,
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Kaspar, Pavel
,
Jindrich Oulehla
Jindrich Oulehla
Brno University of Technology, Faculty of Electrical Engineering and Communication, Physics Department
Brno,
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Oulehla, Jindrich
,
Ştefan Ţălu
Ştefan Ţălu
Technical University of Cluj-Napoca, The Directorate of Research, Development and Innovation Management (DMCDI)
Cluj-Napoca, Romania
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Ţălu, Ştefan
and
Nikola Papež
Nikola Papež
Brno University of Technology, Faculty of Electrical Engineering and Communication, Physics Department
Brno,
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Papež, Nikola
Jan 10, 2020
Materials Science-Poland
AHEAD OF PRINT
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Published Online:
Jan 10, 2020
Received:
Oct 04, 2018
Accepted:
Apr 23, 2019
DOI:
https://doi.org/10.2478/msp-2019-0083
Keywords
atomic force microscopy
,
stereometric analysis
,
TaO
,
topography
© 2019 Dinara Sobola et al., published by Sciendo
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 License.
