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Structural and surface analysis of chemical vapor deposited boron doped aluminum nitride thin film on aluminum substrates

Shanmugan Subramani

Shanmugan Subramani

Nano Optoelectronics Research Laboratory, School of Physics, Universiti Sains Malaysia (USM)Minden, Malaysia
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Subramani, Shanmugan
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Mutharasu Devarajan

Mutharasu Devarajan

Nano Optoelectronics Research Laboratory, School of Physics, Universiti Sains Malaysia (USM)Minden, Malaysia
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Devarajan, Mutharasu
  
Oct 18, 2019
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Published Online: Oct 18, 2019
Page range: 395 - 403
Received: Apr 19, 2018
Accepted: Apr 23, 2019
DOI: https://doi.org/10.2478/msp-2019-0056
Keywords
© 2019 Shanmugan Subramani et al., published by Sciendo
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 3.0 License.
Language:
English
Publication timeframe:
4 times per year
Journal Subjects:
Materials Sciences, Materials Sciences, other, Nanomaterials, Functional and Smart Materials, Materials Characterization and Properties
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