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Materials Science-Poland
Volume 33 (2015): Issue 3 (September 2015)
Open Access
Multifractal characteristics of titanium nitride thin films
Ştefan Ţălu
Ştefan Ţălu
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Ţălu, Ştefan
,
Sebastian Stach
Sebastian Stach
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Stach, Sebastian
,
Shahoo Valedbagi
Shahoo Valedbagi
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Valedbagi, Shahoo
,
Reza Bavadi
Reza Bavadi
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Bavadi, Reza
,
S. Mohammad Elahi
S. Mohammad Elahi
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Elahi, S. Mohammad
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Mihai Ţălu
Mihai Ţălu
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Ţălu, Mihai
Aug 30, 2016
Materials Science-Poland
Volume 33 (2015): Issue 3 (September 2015)
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Published Online:
Aug 30, 2016
Page range:
541 - 548
DOI:
https://doi.org/10.1515/msp-2015-0086
Keywords
atomic force microscopy
,
DC magnetron sputtering
,
multifractal analysis
,
surface roughness
,
titanium nitride (TiN) thin film
© 2016
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 3.0 License.
