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Materials Science-Poland
Volume 33 (2015): Issue 1 (March 2015)
Open Access
Morphological features in aluminum nitride epilayers prepared by magnetron sputtering
Sebastian Stach
Sebastian Stach
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Stach, Sebastian
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Dinara Dallaeva
Dinara Dallaeva
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Dallaeva, Dinara
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Ştefan Ţălu
Ştefan Ţălu
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Ţălu, Ştefan
,
Pavel Kaspar
Pavel Kaspar
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Kaspar, Pavel
,
Pavel Tománek
Pavel Tománek
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Tománek, Pavel
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Stefano Giovanzana
Stefano Giovanzana
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Giovanzana, Stefano
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Lubomír Grmela
Lubomír Grmela
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Grmela, Lubomír
Mar 13, 2015
Materials Science-Poland
Volume 33 (2015): Issue 1 (March 2015)
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Published Online:
Mar 13, 2015
Page range:
175 - 184
Received:
Sep 02, 2014
Accepted:
Dec 01, 2014
DOI:
https://doi.org/10.1515/msp-2015-0036
Keywords
aluminum nitride epilayer
,
atomic force microscopy
,
magnetron sputtering
,
substrate
,
surface roughness
© 2015
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 3.0 License.
