Morphological features in aluminum nitride epilayers prepared by magnetron sputtering

Published Online: Mar 13, 2015

Page range: 175 - 184

Received: Sep 02, 2014

Accepted: Dec 01, 2014

DOI: https://doi.org/10.1515/msp-2015-0036

Keywords

aluminum nitride epilayer, atomic force microscopy, magnetron sputtering, substrate, surface roughness

© 2015

This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 3.0 License.