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Materials Science-Poland
Volume 33 (2015): Issue 1 (March 2015)
Open Access
Surface morphology of titanium nitride thin films synthesized by DC reactive magnetron sputtering
Ştefan Ţǎlu
Ştefan Ţǎlu
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Ţǎlu, Ştefan
,
Sebastian Stach
Sebastian Stach
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Stach, Sebastian
,
Shahoo Valedbagi
Shahoo Valedbagi
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Valedbagi, Shahoo
,
S. Mohammad Elahi
S. Mohammad Elahi
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Elahi, S. Mohammad
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Reza Bavadi
Reza Bavadi
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Bavadi, Reza
Mar 13, 2015
Materials Science-Poland
Volume 33 (2015): Issue 1 (March 2015)
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Published Online:
Mar 13, 2015
Page range:
137 - 143
Received:
Jul 25, 2014
Accepted:
Oct 07, 2014
DOI:
https://doi.org/10.1515/msp-2015-0010
Keywords
atomic force microscopy (AFM)
,
DC reactive magnetron sputtering
,
fractal analysis
,
surface roughness
,
titanium nitride (TiN) thin film
© 2015
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 3.0 License.
