Surface morphology of titanium nitride thin films synthesized by DC reactive magnetron sputtering

Published Online: Mar 13, 2015

Page range: 137 - 143

Received: Jul 25, 2014

Accepted: Oct 07, 2014

DOI: https://doi.org/10.1515/msp-2015-0010

Keywords

atomic force microscopy (AFM), DC reactive magnetron sputtering, fractal analysis, surface roughness, titanium nitride (TiN) thin film

© 2015

This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 3.0 License.