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Design and Analysis of a Micromechanical Three-Component Force Sensor for Characterizing and Quantifying Surface Roughness

Q. Liang

Q. Liang

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Liang, Q.
, 
W. Wu

W. Wu

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Wu, W.
, 
D. Zhang

D. Zhang

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Zhang, D.
, 
B. Wei

B. Wei

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Wei, B.
, 
W. Sun

W. Sun

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Sun, W.
, 
Y. Wang

Y. Wang

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Wang, Y.
 and 
Y. Ge

Y. Ge

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Ge, Y.
  
Oct 29, 2015
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Published Online: Oct 29, 2015
Page range: 248 - 255
Received: Feb 04, 2015
Accepted: Sep 30, 2015
DOI: https://doi.org/10.1515/msr-2015-0034
Keywords
© by Q. Liang
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 License.
Language:
English
Publication timeframe:
6 times per year
Journal Subjects:
Engineering, Electrical Engineering, Control Engineering, Metrology and Testing
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