Design and Analysis of a Micromechanical Three-Component Force Sensor for Characterizing and Quantifying Surface Roughness

Publicado en línea: 29 oct 2015

Páginas: 248 - 255

Recibido: 04 feb 2015

Aceptado: 30 sept 2015

DOI: https://doi.org/10.1515/msr-2015-0034

Palabras clave

Surface roughness metrology, multi-component force sensor, Finite element analysis

© by Q. Liang

This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 License.