Design and Analysis of a Micromechanical Three-Component Force Sensor for Characterizing and Quantifying Surface Roughness

Publié en ligne: 29 oct. 2015

Pages: 248 - 255

Reçu: 04 févr. 2015

Accepté: 30 sept. 2015

DOI: https://doi.org/10.1515/msr-2015-0034

Mots clés

Surface roughness metrology, multi-component force sensor, Finite element analysis

© by Q. Liang

This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 License.