Design and Analysis of a Micromechanical Three-Component Force Sensor for Characterizing and Quantifying Surface Roughness

Data publikacji: 29 paź 2015

Zakres stron: 248 - 255

Otrzymano: 04 lut 2015

Przyjęty: 30 wrz 2015

DOI: https://doi.org/10.1515/msr-2015-0034

Słowa kluczowe

Surface roughness metrology, multi-component force sensor, Finite element analysis

© by Q. Liang

This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 License.