Open Access

Influence of substrate temperature and gas pressure on aluminum oxynitride coatings obtained by pulsed laser deposition

Joanna Piwowarczyk

Joanna Piwowarczyk

Institute of Materials Science and Engineering, West Pomeranian University of TechnologySzczecin, Poland
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Piwowarczyk, Joanna
, 
Roman Jędrzejewski

Roman Jędrzejewski

Institute of Materials Science and Engineering, West Pomeranian University of TechnologySzczecin, Poland
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Jędrzejewski, Roman
 and 
Jolanta Baranowska

Jolanta Baranowska

Institute of Materials Science and Engineering, West Pomeranian University of TechnologySzczecin, Poland
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Baranowska, Jolanta
  
Feb 24, 2017
Influence of substrate temperature and gas pressure on aluminum oxynitride coatings obtained by pulsed laser deposition's Cover Image
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Published Online: Feb 24, 2017
Page range: 254 - 264
Received: Oct 16, 2016
Accepted: Jan 22, 2017
DOI: https://doi.org/10.1515/msp-2017-0033
Keywords
© 2017 Joanna Piwowarczyk, Roman Jędrzejewski, Jolanta Baranowska
This article is distributed under the terms of the Creative Commons Attribution Non-Commercial License, which permits unrestricted non-commercial use, distribution, and reproduction in any medium, provided the original work is properly cited.
AFM images of surface topography (20 μm × 20 μm) of coatings obtained at different substrate temperatures.
AFM images of surface topography (20 μm × 20 μm) of coatings obtained at different substrate temperatures.
Roughness of coatings obtained at different substrate temperatures.
Roughness of coatings obtained at different substrate temperatures.
Thickness of coatings obtained at different substrate temperatures.
Thickness of coatings obtained at different substrate temperatures.
Hardness of coatings obtained at different substrate temperatures.
Hardness of coatings obtained at different substrate temperatures.
Young’s modulus of coatings obtained at different substrate temperatures.
Young’s modulus of coatings obtained at different substrate temperatures.
Surface topography (20 μm × 20 μm) of coatings obtained at various deposition pressures; (a) to (c) is AFM; (d) is optical microscopy, and (e) is SEM.
Surface topography (20 μm × 20 μm) of coatings obtained at various deposition pressures; (a) to (c) is AFM; (d) is optical microscopy, and (e) is SEM.
Roughness of coatings obtained at various deposition pressures.
Roughness of coatings obtained at various deposition pressures.
Thickness of coating obtained at various deposition pressures.
Thickness of coating obtained at various deposition pressures.
Hardness of coatings obtained at various deposition pressures.
Hardness of coatings obtained at various deposition pressures.
Oxygen and nitrogen concentrations (a) and N + O:Al ratio (b) in coatings obtained at different temperatures; EDS and WDS.
Oxygen and nitrogen concentrations (a) and N + O:Al ratio (b) in coatings obtained at different temperatures; EDS and WDS.
Oxygen and nitrogen concentration (a), and N + O:Al ratio (b) in coatings obtained at different pressures; EDS and WDS.
Oxygen and nitrogen concentration (a), and N + O:Al ratio (b) in coatings obtained at different pressures; EDS and WDS.
Oxygen and nitrogen concentration (a), and N + O:Al ratio (b) in coatings obtained at different atmosphere compositions (based on the results presented in the literature [17]); EDS and WDS.
Oxygen and nitrogen concentration (a), and N + O:Al ratio (b) in coatings obtained at different atmosphere compositions (based on the results presented in the literature [17]); EDS and WDS.
Language:
English
Publication timeframe:
4 times per year
Journal Subjects:
Materials Sciences, Materials Sciences, other, Nanomaterials, Functional and Smart Materials, Materials Characterization and Properties
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