Open Access

Influence of substrate temperature and gas pressure on aluminum oxynitride coatings obtained by pulsed laser deposition

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Feb 24, 2017

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Piwowarczyk, Joanna
Institute of Materials Science and Engineering, West Pomeranian University of TechnologySzczecin, Poland
Jędrzejewski, Roman
Institute of Materials Science and Engineering, West Pomeranian University of TechnologySzczecin, Poland
Baranowska, Jolanta
Institute of Materials Science and Engineering, West Pomeranian University of TechnologySzczecin, Poland