Influence of substrate temperature and gas pressure on aluminum oxynitride coatings obtained by pulsed laser deposition
, oraz
24 lut 2017
O artykule
Data publikacji: 24 lut 2017
Zakres stron: 254 - 264
Otrzymano: 16 paź 2016
Przyjęty: 22 sty 2017
DOI: https://doi.org/10.1515/msp-2017-0033
Słowa kluczowe
© 2017 Joanna Piwowarczyk, Roman Jędrzejewski, Jolanta Baranowska
This article is distributed under the terms of the Creative Commons Attribution Non-Commercial License, which permits unrestricted non-commercial use, distribution, and reproduction in any medium, provided the original work is properly cited.











![Oxygen and nitrogen concentration (a), and N + O:Al ratio (b) in coatings obtained at different atmosphere compositions (based on the results presented in the literature [17]); EDS and WDS.](https://sciendo-parsed.s3.eu-central-1.amazonaws.com/647250fc215d2f6c89dc3e5d/j_msp-2017-0033_fig_012.jpg?X-Amz-Algorithm=AWS4-HMAC-SHA256&X-Amz-Content-Sha256=UNSIGNED-PAYLOAD&X-Amz-Credential=AKIA6AP2G7AKOUXAVR44%2F20250909%2Feu-central-1%2Fs3%2Faws4_request&X-Amz-Date=20250909T060552Z&X-Amz-Expires=3600&X-Amz-Signature=341883ca4ec2d9ab0810b0c792b1db632a862d1b88fc129c6067eec6fb086b67&X-Amz-SignedHeaders=host&x-amz-checksum-mode=ENABLED&x-id=GetObject)