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AFM images of surface topography (20 μm × 20 μm) of coatings obtained at different substrate temperatures.Roughness of coatings obtained at different substrate temperatures.Thickness of coatings obtained at different substrate temperatures.Hardness of coatings obtained at different substrate temperatures.Young’s modulus of coatings obtained at different substrate temperatures.Surface topography (20 μm × 20 μm) of coatings obtained at various deposition pressures; (a) to (c) is AFM; (d) is optical microscopy, and (e) is SEM.Roughness of coatings obtained at various deposition pressures.Thickness of coating obtained at various deposition pressures.Hardness of coatings obtained at various deposition pressures.Oxygen and nitrogen concentrations (a) and N + O:Al ratio (b) in coatings obtained at different temperatures; EDS and WDS.Oxygen and nitrogen concentration (a), and N + O:Al ratio (b) in coatings obtained at different pressures; EDS and WDS.Oxygen and nitrogen concentration (a), and N + O:Al ratio (b) in coatings obtained at different atmosphere compositions (based on the results presented in the literature [17]); EDS and WDS.