Uneingeschränkter Zugang

Influence of substrate temperature and gas pressure on aluminum oxynitride coatings obtained by pulsed laser deposition

Joanna Piwowarczyk

Joanna Piwowarczyk

Institute of Materials Science and Engineering, West Pomeranian University of TechnologySzczecin, Poland
Suche nach diesem Autor auf
Sciendo|Google Scholar
Piwowarczyk, Joanna
, 
Roman Jędrzejewski

Roman Jędrzejewski

Institute of Materials Science and Engineering, West Pomeranian University of TechnologySzczecin, Poland
Suche nach diesem Autor auf
Sciendo|Google Scholar
Jędrzejewski, Roman
 und 
Jolanta Baranowska

Jolanta Baranowska

Institute of Materials Science and Engineering, West Pomeranian University of TechnologySzczecin, Poland
Suche nach diesem Autor auf
Sciendo|Google Scholar
Baranowska, Jolanta
  
24. Feb. 2017
Influence of substrate temperature and gas pressure on aluminum oxynitride coatings obtained by pulsed laser deposition's Cover Image
Über diesen Artikel
Vorheriger Artikel
Nächster Artikel
Zitieren
COVER HERUNTERLADEN
Online veröffentlicht: 24. Feb. 2017
Seitenbereich: 254 - 264
Eingereicht: 16. Okt. 2016
Akzeptiert: 22. Jan. 2017
DOI: https://doi.org/10.1515/msp-2017-0033
Schlüsselwörter
© 2017 Joanna Piwowarczyk, Roman Jędrzejewski, Jolanta Baranowska
This article is distributed under the terms of the Creative Commons Attribution Non-Commercial License, which permits unrestricted non-commercial use, distribution, and reproduction in any medium, provided the original work is properly cited.
AFM images of surface topography (20 μm × 20 μm) of coatings obtained at different substrate temperatures.
AFM images of surface topography (20 μm × 20 μm) of coatings obtained at different substrate temperatures.
Roughness of coatings obtained at different substrate temperatures.
Roughness of coatings obtained at different substrate temperatures.
Thickness of coatings obtained at different substrate temperatures.
Thickness of coatings obtained at different substrate temperatures.
Hardness of coatings obtained at different substrate temperatures.
Hardness of coatings obtained at different substrate temperatures.
Young’s modulus of coatings obtained at different substrate temperatures.
Young’s modulus of coatings obtained at different substrate temperatures.
Surface topography (20 μm × 20 μm) of coatings obtained at various deposition pressures; (a) to (c) is AFM; (d) is optical microscopy, and (e) is SEM.
Surface topography (20 μm × 20 μm) of coatings obtained at various deposition pressures; (a) to (c) is AFM; (d) is optical microscopy, and (e) is SEM.
Roughness of coatings obtained at various deposition pressures.
Roughness of coatings obtained at various deposition pressures.
Thickness of coating obtained at various deposition pressures.
Thickness of coating obtained at various deposition pressures.
Hardness of coatings obtained at various deposition pressures.
Hardness of coatings obtained at various deposition pressures.
Oxygen and nitrogen concentrations (a) and N + O:Al ratio (b) in coatings obtained at different temperatures; EDS and WDS.
Oxygen and nitrogen concentrations (a) and N + O:Al ratio (b) in coatings obtained at different temperatures; EDS and WDS.
Oxygen and nitrogen concentration (a), and N + O:Al ratio (b) in coatings obtained at different pressures; EDS and WDS.
Oxygen and nitrogen concentration (a), and N + O:Al ratio (b) in coatings obtained at different pressures; EDS and WDS.
Oxygen and nitrogen concentration (a), and N + O:Al ratio (b) in coatings obtained at different atmosphere compositions (based on the results presented in the literature [17]); EDS and WDS.
Oxygen and nitrogen concentration (a), and N + O:Al ratio (b) in coatings obtained at different atmosphere compositions (based on the results presented in the literature [17]); EDS and WDS.
Sprache:
Englisch
Zeitrahmen der Veröffentlichung:
4 Hefte pro Jahr
Fachgebiete der Zeitschrift:
Materialwissenschaft, Materialwissenschaft, andere, Nanomaterialien, Funktionelle und Intelligente Materialien, Charakterisierung und Eigenschaften von Materialien
Zeitschrift RSS Feed