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Journal of Electrical Engineering
Édition 70 (2019): Edition 7 (December 2019)
Accès libre
Approximate methods for the optical characterization of inhomogeneous thin films: Applications to silicon nitride films
Ivan Ohlídal
Ivan Ohlídal
,
Jiří Vohánka
Jiří Vohánka
,
Daniel Franta
Daniel Franta
,
Martin Čermák
Martin Čermák
,
Jaroslav Ženíšek
Jaroslav Ženíšek
et
Petr Vašina
Petr Vašina
| 28 sept. 2019
Journal of Electrical Engineering
Édition 70 (2019): Edition 7 (December 2019)
Special Issue
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Publié en ligne:
28 sept. 2019
Pages:
16 - 26
Reçu:
19 mars 2019
DOI:
https://doi.org/10.2478/jee-2019-0037
Mots clés
reflectance
,
ellipsometric parameters
,
inhomogeneous thin films
,
optical characterization
© 2019 Ivan Ohlídal et al., published by Sciendo
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 License.
Ivan Ohlídal
Department of Physical Electronic, Faculty of Science, Masaryk University
Brno
Jiří Vohánka
Department of Physical Electronic, Faculty of Science, Masaryk University
Brno
Daniel Franta
Department of Physical Electronic, Faculty of Science, Masaryk University
Brno
Martin Čermák
Department of Physical Electronic, Faculty of Science, Masaryk University
Brno
Jaroslav Ženíšek
Department of Physical Electronic, Faculty of Science, Masaryk University
Brno
Petr Vašina
Department of Physical Electronic, Faculty of Science, Masaryk University
Brno