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Approximate methods for the optical characterization of inhomogeneous thin films: Applications to silicon nitride films


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Ivan Ohlídal
Department of Physical Electronic, Faculty of Science, Masaryk UniversityBrno
Jiří Vohánka
Department of Physical Electronic, Faculty of Science, Masaryk UniversityBrno
Daniel Franta
Department of Physical Electronic, Faculty of Science, Masaryk UniversityBrno
Martin Čermák
Department of Physical Electronic, Faculty of Science, Masaryk UniversityBrno
Jaroslav Ženíšek
Department of Physical Electronic, Faculty of Science, Masaryk UniversityBrno
Petr Vašina
Department of Physical Electronic, Faculty of Science, Masaryk UniversityBrno
eISSN:
1339-309X
Sprache:
Englisch
Zeitrahmen der Veröffentlichung:
6 Hefte pro Jahr
Fachgebiete der Zeitschrift:
Technik, Einführungen und Gesamtdarstellungen, andere