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Journal of Electrical Engineering
Volume 70 (2019): Issue 7 (December 2019)
Open Access
Approximate methods for the optical characterization of inhomogeneous thin films: Applications to silicon nitride films
Ivan Ohlídal
Ivan Ohlídal
,
Jiří Vohánka
Jiří Vohánka
,
Daniel Franta
Daniel Franta
,
Martin Čermák
Martin Čermák
,
Jaroslav Ženíšek
Jaroslav Ženíšek
and
Petr Vašina
Petr Vašina
| Sep 28, 2019
Journal of Electrical Engineering
Volume 70 (2019): Issue 7 (December 2019)
Special Issue
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Published Online:
Sep 28, 2019
Page range:
16 - 26
Received:
Mar 19, 2019
DOI:
https://doi.org/10.2478/jee-2019-0037
Keywords
reflectance
,
ellipsometric parameters
,
inhomogeneous thin films
,
optical characterization
© 2019 Ivan Ohlídal et al., published by Sciendo
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 License.
Ivan Ohlídal
Department of Physical Electronic, Faculty of Science, Masaryk University
Brno
Jiří Vohánka
Department of Physical Electronic, Faculty of Science, Masaryk University
Brno
Daniel Franta
Department of Physical Electronic, Faculty of Science, Masaryk University
Brno
Martin Čermák
Department of Physical Electronic, Faculty of Science, Masaryk University
Brno
Jaroslav Ženíšek
Department of Physical Electronic, Faculty of Science, Masaryk University
Brno
Petr Vašina
Department of Physical Electronic, Faculty of Science, Masaryk University
Brno