Macroscopic Thin Film Deposition Model for the Two-Reactive-Gas Sputtering Process
Publié en ligne: 09 sept. 2017
Pages: 62 - 78
Reçu: 15 févr. 2017
© 2016 András Kelemen et al., published by De Gruyter Open
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 3.0 License.