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Pixel level vacuum packaging for single layer microbolometer detectors with on pixel lens

M. Yusuf Tanrikulu

M. Yusuf Tanrikulu

Department of Electrical-Electronics Engineering, Adana Alparslan Turkes Science and Technology University, Metu Mems Center, Middle East Technical UniversityAdana,
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Tanrikulu, M. Yusuf
  
Jul 11, 2022
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Published Online: Jul 11, 2022
Page range: 203 - 208
Received: Jun 04, 2022
DOI: https://doi.org/10.2478/jee-2022-0027
Keywords
© 2022 M. Yusuf Tanrikulu, published by Sciendo
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International License.
Language:
English
Publication timeframe:
6 times per year
Journal Subjects:
Engineering, Introductions and Overviews, Engineering, other
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