Pixel level vacuum packaging for single layer microbolometer detectors with on pixel lens
M. Yusuf Tanrikulu
Department of Electrical-Electronics Engineering, Adana Alparslan Turkes Science and Technology University, Metu Mems Center, Middle East Technical UniversityAdana,
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Jul 11, 2022
About this article
Published Online: Jul 11, 2022
Page range: 203 - 208
Received: Jun 04, 2022
DOI: https://doi.org/10.2478/jee-2022-0027
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© 2022 M. Yusuf Tanrikulu, published by Sciendo
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International License.
Tanrikulu, M. Yusuf
Department of Electrical-Electronics Engineering, Adana Alparslan Turkes Science and Technology University, Metu Mems Center, Middle East Technical UniversityAdana