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Materials Science-Poland
Volume 36 (2018): Issue 1 (March 2018)
Open Access
Application of radio frequency inductively coupled plasma in chemical vapor deposition process of diamond-like carbon films for modification of properties of deposited films
Wojciech Kijaszek
Wojciech Kijaszek
,
Waldemar Oleszkiewicz
Waldemar Oleszkiewicz
and
Zbigniew Znamirowski
Zbigniew Znamirowski
| May 18, 2018
Materials Science-Poland
Volume 36 (2018): Issue 1 (March 2018)
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Published Online:
May 18, 2018
Page range:
80 - 85
Received:
Apr 03, 2017
Accepted:
Jan 24, 2018
DOI:
https://doi.org/10.1515/msp-2017-0119
Keywords
diamond-like carbon
,
RF ICP PECVD
,
Raman scattering spectroscopy
,
field emission
© 2018
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 License.