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Stereometric analysis of Ta2O5 thin films

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10 sty 2020

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Sobola, Dinara
Brno University of Technology, Faculty of Electrical Engineering and Communication, Physics DepartmentBrno
Kaspar, Pavel
Brno University of Technology, Faculty of Electrical Engineering and Communication, Physics DepartmentBrno
Oulehla, Jindrich
Brno University of Technology, Faculty of Electrical Engineering and Communication, Physics DepartmentBrno
Ţălu, Ştefan
Technical University of Cluj-Napoca, The Directorate of Research, Development and Innovation Management (DMCDI)Cluj-Napoca, Romania
Papež, Nikola
Brno University of Technology, Faculty of Electrical Engineering and Communication, Physics DepartmentBrno