Otwarty dostęp

Correction of Scanning Steps to Improve Accuracy in Interferometric Profilometer


Zacytuj

E. Sysoev
Technological Design Institute of Scientific Instrument Engineering, Siberian Branch of the Russian Academy of Sciences (TDI SIE SB RAS), 41, Russkaya str., Novosibirsk, 630058, Russia
R. Kulikov
Technological Design Institute of Scientific Instrument Engineering, Siberian Branch of the Russian Academy of Sciences (TDI SIE SB RAS), 41, Russkaya str., Novosibirsk, 630058, Russia
I. Vykhristyuk
Technological Design Institute of Scientific Instrument Engineering, Siberian Branch of the Russian Academy of Sciences (TDI SIE SB RAS), 41, Russkaya str., Novosibirsk, 630058, Russia
Yu. Chugui
Technological Design Institute of Scientific Instrument Engineering, Siberian Branch of the Russian Academy of Sciences (TDI SIE SB RAS), 41, Russkaya str., Novosibirsk, 630058, Russia
Novosibirsk State University, 2, Pirogova str., Novosibirsk, 630090, Russia
Novosibirsk State Technical University, 20, K. Marksa pr., Novosibirsk, 630073, Russia
eISSN:
1335-8871
Język:
Angielski
Częstotliwość wydawania:
6 razy w roku
Dziedziny czasopisma:
Engineering, Electrical Engineering, Control Engineering, Metrology and Testing