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Correction of Scanning Steps to Improve Accuracy in Interferometric Profilometer


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E. Sysoev
Technological Design Institute of Scientific Instrument Engineering, Siberian Branch of the Russian Academy of Sciences (TDI SIE SB RAS), 41, Russkaya str., Novosibirsk, 630058, Russia
R. Kulikov
Technological Design Institute of Scientific Instrument Engineering, Siberian Branch of the Russian Academy of Sciences (TDI SIE SB RAS), 41, Russkaya str., Novosibirsk, 630058, Russia
I. Vykhristyuk
Technological Design Institute of Scientific Instrument Engineering, Siberian Branch of the Russian Academy of Sciences (TDI SIE SB RAS), 41, Russkaya str., Novosibirsk, 630058, Russia
Yu. Chugui
Technological Design Institute of Scientific Instrument Engineering, Siberian Branch of the Russian Academy of Sciences (TDI SIE SB RAS), 41, Russkaya str., Novosibirsk, 630058, Russia
Novosibirsk State University, 2, Pirogova str., Novosibirsk, 630090, Russia
Novosibirsk State Technical University, 20, K. Marksa pr., Novosibirsk, 630073, Russia
eISSN:
1335-8871
Sprache:
Englisch
Zeitrahmen der Veröffentlichung:
6 Hefte pro Jahr
Fachgebiete der Zeitschrift:
Technik, Elektrotechnik, Mess-, Steuer- und Regelungstechnik