Mechanical and structural properties of titanium dioxide deposited by innovative magnetron sputtering process

Data publikacji: 30 sie 2016

Zakres stron: 660 - 668

Otrzymano: 09 mar 2015

Przyjęty: 20 maj 2015

DOI: https://doi.org/10.1515/msp-2015-0084

Słowa kluczowe

plasma modulated magnetron sputtering, titanium dioxide, hardness, scratch resistance, optical and structural properties

© 2016

This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 3.0 License.