Mechanical and structural properties of titanium dioxide deposited by innovative magnetron sputtering process

Publicado en línea: 30 ago 2016

Páginas: 660 - 668

Recibido: 09 mar 2015

Aceptado: 20 may 2015

DOI: https://doi.org/10.1515/msp-2015-0084

Palabras clave

plasma modulated magnetron sputtering, titanium dioxide, hardness, scratch resistance, optical and structural properties

© 2016

This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 3.0 License.