Mechanical and structural properties of titanium dioxide deposited by innovative magnetron sputtering process

Published Online: Aug 30, 2016

Page range: 660 - 668

Received: Mar 09, 2015

Accepted: May 20, 2015

DOI: https://doi.org/10.1515/msp-2015-0084

Keywords

plasma modulated magnetron sputtering, titanium dioxide, hardness, scratch resistance, optical and structural properties

© 2016

This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 3.0 License.