Computer simulation of sputtering of graphite target in magnetron sputtering device with two zones of erosion

Pubblicato online: 13 mar 2015

Pagine: 82 - 94

Ricevuto: 21 mag 2014

Accettato: 20 set 2014

DOI: https://doi.org/10.1515/msp-2015-0001

Parole chiave

Monte Carlo computer simulation, magnetron sputtering, flux of particles, carbon, graphite target, energy of particles

© 2015

This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 3.0 License.