Computer simulation of sputtering of graphite target in magnetron sputtering device with two zones of erosion

Publié en ligne: 13 mars 2015

Pages: 82 - 94

Reçu: 21 mai 2014

Accepté: 20 sept. 2014

DOI: https://doi.org/10.1515/msp-2015-0001

Mots clés

Monte Carlo computer simulation, magnetron sputtering, flux of particles, carbon, graphite target, energy of particles

© 2015

This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 3.0 License.