Computer simulation of sputtering of graphite target in magnetron sputtering device with two zones of erosion

Publicado en línea: 13 mar 2015

Páginas: 82 - 94

Recibido: 21 may 2014

Aceptado: 20 sept 2014

DOI: https://doi.org/10.1515/msp-2015-0001

Palabras clave

Monte Carlo computer simulation, magnetron sputtering, flux of particles, carbon, graphite target, energy of particles

© 2015

This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 3.0 License.