Structural and surface analysis of chemical vapor deposited boron doped aluminum nitride thin film on aluminum substrates
et
18 oct. 2019
À propos de cet article
Publié en ligne: 18 oct. 2019
Pages: 395 - 403
Reçu: 19 avr. 2018
Accepté: 23 avr. 2019
DOI: https://doi.org/10.2478/msp-2019-0056
Mots clés
© 2019 Shanmugan Subramani et al., published by Sciendo
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 3.0 License.
Subramani, Shanmugan
Nano Optoelectronics Research Laboratory, School of Physics, Universiti Sains Malaysia (USM)Minden, Malaysia
Devarajan, Mutharasu
Nano Optoelectronics Research Laboratory, School of Physics, Universiti Sains Malaysia (USM)Minden, Malaysia