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3D Printed Pressure Sensor Based on Surface Acoustic Wave Resonator

Baofa Hu

Baofa Hu

  • Pen-Tung Sah Institute of Micro-Nano Science and Technology, Xiamen UniversityXiamen, China
  • Shenzhen Research Institute of Xiamen UniversityShenzhen, China
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Hu, Baofa
, 
Zhiwei Li

Zhiwei Li

  • Pen-Tung Sah Institute of Micro-Nano Science and Technology, Xiamen UniversityXiamen, China
  • Shenzhen Research Institute of Xiamen UniversityShenzhen, China
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Li, Zhiwei
, 
Yuanjie Wan

Yuanjie Wan

  • School of Electronic Science and Engineering, Xiamen UniversityXiamen, China
  • Shenzhen Research Institute of Xiamen UniversityShenzhen, China
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Wan, Yuanjie
, 
Peng Zhou

Peng Zhou

  • Pen-Tung Sah Institute of Micro-Nano Science and Technology, Xiamen UniversityXiamen, China
  • Shenzhen Research Institute of Xiamen UniversityShenzhen, China
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Zhou, Peng
, 
Chunquan Zhang

Chunquan Zhang

Pen-Tung Sah Institute of Micro-Nano Science and Technology, Xiamen UniversityXiamen, China
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Zhang, Chunquan
 and 
Haisheng San

Haisheng San

  • Pen-Tung Sah Institute of Micro-Nano Science and Technology, Xiamen UniversityXiamen, China
  • School of Electronic Science and Engineering, Xiamen UniversityXiamen, China
  • Shenzhen Research Institute of Xiamen UniversityShenzhen, China
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San, Haisheng
  
Jun 24, 2021
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Published Online: Jun 24, 2021
Page range: 76 - 81
Received: Mar 30, 2021
Accepted: May 31, 2021
DOI: https://doi.org/10.2478/msr-2021-0011
Keywords
© 2021 Baofa Hu et al., published by Sciendo
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 3.0 License.

This paper reports a 3-dimentional (3D) pressure sensor based on surface acoustic wave (SAW) resonators. The SAW resonators were designed and fabricated on 128°Y-X LiNbO3 substrate using the MEMS technology. The pressure sensing structure was 3D-printed using polyactic acid plastic, and two SAW resonators were integrated in the 3D-printed chamber structure for both temperature and pressure sensing. The SAW-based gas pressure sensors demonstrate a sensitivity of 589 ppm/MPa at the pressure range of 100-600 kPa and temperature of 40 °C.

Language:
English
Publication timeframe:
6 times per year
Journal Subjects:
Engineering, Electrical Engineering, Control Engineering, Metrology and Testing
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