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3D Printed Pressure Sensor Based on Surface Acoustic Wave Resonator

Baofa Hu

Baofa Hu

  • Pen-Tung Sah Institute of Micro-Nano Science and Technology, Xiamen UniversityXiamen, China
  • Shenzhen Research Institute of Xiamen UniversityShenzhen, China
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Hu, Baofa
, 
Zhiwei Li

Zhiwei Li

  • Pen-Tung Sah Institute of Micro-Nano Science and Technology, Xiamen UniversityXiamen, China
  • Shenzhen Research Institute of Xiamen UniversityShenzhen, China
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Li, Zhiwei
, 
Yuanjie Wan

Yuanjie Wan

  • School of Electronic Science and Engineering, Xiamen UniversityXiamen, China
  • Shenzhen Research Institute of Xiamen UniversityShenzhen, China
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Wan, Yuanjie
, 
Peng Zhou

Peng Zhou

  • Pen-Tung Sah Institute of Micro-Nano Science and Technology, Xiamen UniversityXiamen, China
  • Shenzhen Research Institute of Xiamen UniversityShenzhen, China
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Zhou, Peng
, 
Chunquan Zhang

Chunquan Zhang

Pen-Tung Sah Institute of Micro-Nano Science and Technology, Xiamen UniversityXiamen, China
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Zhang, Chunquan
 oraz 
Haisheng San

Haisheng San

  • Pen-Tung Sah Institute of Micro-Nano Science and Technology, Xiamen UniversityXiamen, China
  • School of Electronic Science and Engineering, Xiamen UniversityXiamen, China
  • Shenzhen Research Institute of Xiamen UniversityShenzhen, China
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San, Haisheng
  
24 cze 2021
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Data publikacji: 24 cze 2021
Zakres stron: 76 - 81
Otrzymano: 30 mar 2021
Przyjęty: 31 maj 2021
DOI: https://doi.org/10.2478/msr-2021-0011
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© 2021 Baofa Hu et al., published by Sciendo
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 3.0 License.

This paper reports a 3-dimentional (3D) pressure sensor based on surface acoustic wave (SAW) resonators. The SAW resonators were designed and fabricated on 128°Y-X LiNbO3 substrate using the MEMS technology. The pressure sensing structure was 3D-printed using polyactic acid plastic, and two SAW resonators were integrated in the 3D-printed chamber structure for both temperature and pressure sensing. The SAW-based gas pressure sensors demonstrate a sensitivity of 589 ppm/MPa at the pressure range of 100-600 kPa and temperature of 40 °C.

Język:
Angielski
Częstotliwość wydawania:
6 razy w roku
Dziedziny czasopisma:
Inżynieria, Elektrotechnika, Inżynieria sterowania, metrologia i testowanie
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