3D Printed Pressure Sensor Based on Surface Acoustic Wave Resonator
, , , , and
Jun 24, 2021
About this article
Published Online: Jun 24, 2021
Page range: 76 - 81
Received: Mar 30, 2021
Accepted: May 31, 2021
DOI: https://doi.org/10.2478/msr-2021-0011
Keywords
© 2021 Baofa Hu et al., published by Sciendo
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 3.0 License.
Hu, Baofa
Pen-Tung Sah Institute of Micro-Nano Science and Technology, Xiamen UniversityXiamen, China
Shenzhen Research Institute of Xiamen UniversityShenzhen, China
Li, Zhiwei
Pen-Tung Sah Institute of Micro-Nano Science and Technology, Xiamen UniversityXiamen, China
Shenzhen Research Institute of Xiamen UniversityShenzhen, China
Wan, Yuanjie
School of Electronic Science and Engineering, Xiamen UniversityXiamen, China
Shenzhen Research Institute of Xiamen UniversityShenzhen, China
Zhou, Peng
Pen-Tung Sah Institute of Micro-Nano Science and Technology, Xiamen UniversityXiamen, China
Shenzhen Research Institute of Xiamen UniversityShenzhen, China
Zhang, Chunquan
Pen-Tung Sah Institute of Micro-Nano Science and Technology, Xiamen UniversityXiamen, China
San, Haisheng
Pen-Tung Sah Institute of Micro-Nano Science and Technology, Xiamen UniversityXiamen, China
School of Electronic Science and Engineering, Xiamen UniversityXiamen, China
Shenzhen Research Institute of Xiamen UniversityShenzhen, China