Open Access

Optical properties of AlN layers obtained by magnetron sputtering

Piotr Potera

Piotr Potera

Faculty of Mathematics and Natural Sciences, University of RzeszowRzeszow, Poland
Search for this author on
Sciendo|Google Scholar
Potera, Piotr
, 
Grzegorz Wisz

Grzegorz Wisz

Faculty of Mathematics and Natural Sciences, University of RzeszowRzeszow, Poland
Search for this author on
Sciendo|Google Scholar
Wisz, Grzegorz
 and 
Łukasz Szyller

Łukasz Szyller

Faculty of Mathematics and Natural Sciences, University of RzeszowRzeszow, Poland
Search for this author on
Sciendo|Google Scholar
Szyller, Łukasz
  
Feb 01, 2019
Optical properties of AlN layers obtained by magnetron sputtering's Cover Image
About this article
Previous Article
Next Article
Cite
Download Cover
Published Online: Feb 01, 2019
Page range: 717 - 721
Received: Dec 29, 2017
Accepted: Mar 22, 2018
DOI: https://doi.org/10.2478/msp-2018-0087
Keywords
© 2018 Piotr Potera et al., published by Sciendo
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 License.
Potera, Piotr
Faculty of Mathematics and Natural Sciences, University of RzeszowRzeszow, Poland
Wisz, Grzegorz
Faculty of Mathematics and Natural Sciences, University of RzeszowRzeszow, Poland
Szyller, Łukasz
Faculty of Mathematics and Natural Sciences, University of RzeszowRzeszow, Poland
Language:
English
Publication timeframe:
4 times per year
Journal Subjects:
Materials Sciences, Materials Sciences, other, Nanomaterials, Functional and Smart Materials, Materials Characterization and Properties
Journal RSS Feed