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Materials Science-Poland
Volume 36 (2018): Issue 4 (December 2018)
Open Access
Optical properties of AlN layers obtained by magnetron sputtering
Piotr Potera
Piotr Potera
Faculty of Mathematics and Natural Sciences, University of Rzeszow
Rzeszow, Poland
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Potera, Piotr
,
Grzegorz Wisz
Grzegorz Wisz
Faculty of Mathematics and Natural Sciences, University of Rzeszow
Rzeszow, Poland
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Wisz, Grzegorz
and
Łukasz Szyller
Łukasz Szyller
Faculty of Mathematics and Natural Sciences, University of Rzeszow
Rzeszow, Poland
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Szyller, Łukasz
Feb 01, 2019
Materials Science-Poland
Volume 36 (2018): Issue 4 (December 2018)
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Published Online:
Feb 01, 2019
Page range:
717 - 721
Received:
Dec 29, 2017
Accepted:
Mar 22, 2018
DOI:
https://doi.org/10.2478/msp-2018-0087
Keywords
optical properties
,
thin films
,
AlN
© 2018 Piotr Potera et al., published by Sciendo
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 License.
