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Optical properties of AlN layers obtained by magnetron sputtering

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01 feb 2019
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Potera, Piotr
Faculty of Mathematics and Natural Sciences, University of RzeszowRzeszow, Poland
Wisz, Grzegorz
Faculty of Mathematics and Natural Sciences, University of RzeszowRzeszow, Poland
Szyller, Łukasz
Faculty of Mathematics and Natural Sciences, University of RzeszowRzeszow, Poland