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Journal of Electrical Engineering
Volume 72 (2021): Issue 1 (February 2021)
Open Access
Preparation and gas-sensing properties of very thin sputtered NiO films
Ivan Hotovy
Ivan Hotovy
,
Vlastimil Rehacek
Vlastimil Rehacek
,
Martin Kemeny
Martin Kemeny
,
Peter Ondrejka
Peter Ondrejka
,
Ivan Kostic
Ivan Kostic
,
Miroslav Mikolasek
Miroslav Mikolasek
and
Lothar Spiess
Lothar Spiess
| Mar 18, 2021
Journal of Electrical Engineering
Volume 72 (2021): Issue 1 (February 2021)
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Published Online:
Mar 18, 2021
Page range:
61 - 65
Received:
Jan 20, 2021
DOI:
https://doi.org/10.2478/jee-2021-0009
Keywords
NiO films
,
reactive magnetron sputtering
,
alumina substrate
,
gas sensors
,
acetone
,
toluene
,
n-butyl acetate
© 2021 Ivan Hotovy et al., published by Sciendo
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International License.