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Journal of Electrical Engineering
Volume 72 (2021): Issue 1 (February 2021)
Open Access
Preparation and gas-sensing properties of very thin sputtered NiO films
Ivan Hotovy
Ivan Hotovy
,
Vlastimil Rehacek
Vlastimil Rehacek
,
Martin Kemeny
Martin Kemeny
,
Peter Ondrejka
Peter Ondrejka
,
Ivan Kostic
Ivan Kostic
,
Miroslav Mikolasek
Miroslav Mikolasek
and
Lothar Spiess
Lothar Spiess
| Mar 18, 2021
Journal of Electrical Engineering
Volume 72 (2021): Issue 1 (February 2021)
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Published Online:
Mar 18, 2021
Page range:
61 - 65
Received:
Jan 20, 2021
DOI:
https://doi.org/10.2478/jee-2021-0009
Keywords
NiO films
,
reactive magnetron sputtering
,
alumina substrate
,
gas sensors
,
acetone
,
toluene
,
n-butyl acetate
© 2021 Ivan Hotovy et al., published by Sciendo
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International License.
Ivan Hotovy
Institute of Electronics and Photonics Slovak University of Technology
Bratislava, Slovakia
Vlastimil Rehacek
Institute of Electronics and Photonics Slovak University of Technology
Bratislava, Slovakia
Martin Kemeny
Institute of Electronics and Photonics Slovak University of Technology
Bratislava, Slovakia
Peter Ondrejka
Institute of Electronics and Photonics Slovak University of Technology
Bratislava, Slovakia
Ivan Kostic
Institute of Informatics, Slovak Academy of Sciences
Bratislava, Slovakia
Miroslav Mikolasek
Institute of Electronics and Photonics Slovak University of Technology
Bratislava, Slovakia
Lothar Spiess
Department of Materials Technology, Technical University of Ilmenau
Ilmenau, Germany