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Journals
Journal of Electrical Engineering
Volume 72 (2021): Issue 1 (February 2021)
Open Access
Preparation and gas-sensing properties of very thin sputtered NiO films
Ivan Hotovy
Ivan Hotovy
Institute of Electronics and Photonics, Slovak University of Technology
Bratislava, Slovakia
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Hotovy, Ivan
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Vlastimil Rehacek
Vlastimil Rehacek
Institute of Electronics and Photonics, Slovak University of Technology
Bratislava, Slovakia
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Rehacek, Vlastimil
,
Martin Kemeny
Martin Kemeny
Institute of Electronics and Photonics, Slovak University of Technology
Bratislava, Slovakia
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Kemeny, Martin
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Peter Ondrejka
Peter Ondrejka
Institute of Electronics and Photonics, Slovak University of Technology
Bratislava, Slovakia
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Ondrejka, Peter
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Ivan Kostic
Ivan Kostic
Institute of Informatics, Slovak Academy of Sciences
Bratislava, Slovakia
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Kostic, Ivan
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Miroslav Mikolasek
Miroslav Mikolasek
Institute of Electronics and Photonics, Slovak University of Technology
Bratislava, Slovakia
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Mikolasek, Miroslav
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Lothar Spiess
Lothar Spiess
Department of Materials Technology, Technical University of Ilmenau
Ilmenau, Germany
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Spiess, Lothar
Mar 18, 2021
Journal of Electrical Engineering
Volume 72 (2021): Issue 1 (February 2021)
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Published Online:
Mar 18, 2021
Page range:
61 - 65
Received:
Jan 20, 2021
DOI:
https://doi.org/10.2478/jee-2021-0009
Keywords
NiO films
,
reactive magnetron sputtering
,
alumina substrate
,
gas sensors
,
acetone
,
toluene
,
n-butyl acetate
© 2021 Ivan Hotovy et al., published by Sciendo
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International License.
