Graphene prepared on SiC by chemical vapor deposition process at low temperature
Oct 21, 2019
About this article
Published Online: Oct 21, 2019
Page range: 329 - 331
Received: Jun 06, 2019
DOI: https://doi.org/10.2478/jee-2019-0064
Keywords
© 2019 Petr Machac, published by Sciendo
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 License.
Graphene preparation by the method of chemical vapour deposition on SiC substrates is described. Despite very low growth temperature (1080 °C) and with use of methane atmosphere, carbon layers in the form of multi-layer graphene were prepared. Graphene quality was verified by means of available analytical methods: Raman spectroscopy, X-ray photoelectron spectroscopy, Van der Paw method.