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Microstructuring of SU-8 Resist for MEMS and Bio-Applications

P.K. Dey

P.K. Dey

Advanced Technology Centre Development, Indian Institute of TechnologyKharagpur, India
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Dey, P.K.
, 
B. Pramanick

B. Pramanick

Advanced Technology Centre Development, Indian Institute of TechnologyKharagpur, India
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Pramanick, B.
, 
A. RaviShankar

A. RaviShankar

Department of Electronics and Communication Engineering, School of Electrical Sciences, Karunya UniversityCoimbatore, India
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RaviShankar, A.
, 
P. Ganguly

P. Ganguly

Advanced Technology Centre Development, Indian Institute of TechnologyKharagpur, India
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Ganguly, P.
 and 
S. Das

S. Das

School of Medical Science and Technology Indian Institute of TechnologyKharagpur, India
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Das, S.
  
Dec 13, 2017
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Published Online: Dec 13, 2017
Page range: 118 - 129
DOI: https://doi.org/10.21307/ijssis-2017-384
Keywords
© 2010 P.K. Dey et al., published by Sciendo
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International License.
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English
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Engineering, Introductions and Overviews, Engineering, other
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