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A Design Analysis Of Micromirrors In Stacked Configurations With Moving Electrodes

Sangtak Park

Sangtak Park

Department of Systems Design Engineering, University of WaterlooOntario, Canada
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Park, Sangtak
, 
So-Ra Chung

So-Ra Chung

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Chung, So-Ra
 and 
John T.W. Yeow

John T.W. Yeow

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Yeow, John T.W.
  
Dec 13, 2017
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Published Online: Dec 13, 2017
Page range: 480 - 497
DOI: https://doi.org/10.21307/ijssis-2017-303
Keywords
© 2008 Sangtak Park et al., published by Sciendo
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International License.
Park, Sangtak
Department of Systems Design Engineering, University of WaterlooOntario, Canada
Chung, So-Ra
Yeow, John T.W.
Language:
English
Publication timeframe:
1 times per year
Journal Subjects:
Engineering, Introductions and Overviews, Engineering, other
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