A Design Analysis Of Micromirrors In Stacked Configurations With Moving Electrodes

Publicado en línea: 13 dic 2017

Páginas: 480 - 497

DOI: https://doi.org/10.21307/ijssis-2017-303

Palabras clave

Micromirror, MEMS, Electrostatic Force Actuation, Deflection Angle, Endoscope, OCT (Optical Coherence Tomography), Stacked Micromirror Configuration

© 2008 Sangtak Park et al., published by Sciendo

This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International License.