A Design Analysis Of Micromirrors In Stacked Configurations With Moving Electrodes
, e
13 dic 2017
INFORMAZIONI SU QUESTO ARTICOLO
Pubblicato online: 13 dic 2017
Pagine: 480 - 497
DOI: https://doi.org/10.21307/ijssis-2017-303
Parole chiave
© 2008 Sangtak Park et al., published by Sciendo
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International License.
Park, Sangtak
Department of Systems Design Engineering, University of WaterlooOntario, Canada
Chung, So-Ra
Yeow, John T.W.